Title:
IC HANDLER WITH VISUAL INSPECTION FUNCTION
Document Type and Number:
Japanese Patent JP3105837
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To detect variation in the shape of a lead immediately after electric characteristic test with minimum increase in scale of an inspection system.
SOLUTION: A measuring section 13 comprises a CCD camera 1 disposed in a cavity made in the central of a contact pusher 4 in order to pick up the image of an IC 6 to be tested mounted on an IC socket 9 and to output a corresponding video signal V, and a ring light 5 for illuminating the IC 6. A visual inspecting section 2 comprises a display 3 for receiving the video signal V and displaying an corresponding image.
Inventors:
Junko Tanaka
Application Number:
JP22805397A
Publication Date:
November 06, 2000
Filing Date:
August 25, 1997
Export Citation:
Assignee:
Kyushu NEC Corporation
International Classes:
H01L21/66; G01R31/26; (IPC1-7): G01R31/26; H01L21/66
Domestic Patent References:
| JP6342035A | ||||
| JP8304510A | ||||
| JP548347U |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)