Title:
分光器を用いた位相差測定装置
Document Type and Number:
Japanese Patent JP5116346
Kind Code:
B2
Abstract:
An apparatus for measuring a phase difference using a spectrometer is provided to improve the measurement accuracy by correcting a loss of transmittance due to absorption and dispersion. An apparatus for measuring a phase difference using a spectrometer comprises an optical system wherein a light source, a polarizer, a sample stage, an analyzer, and a spectrometer are sequentially placed and a calculating unit. A wave plate is placed between the spectrometer and the analyzer. A value obtained by dividing a retardation value of the wave plate by a constant or semi-constant of 0.5 or above is identical to each of two or more wavelength in a wavelength region.
Inventors:
Ichiro Amimori
Fumio Obata
Hiroki Takahashi
Fumio Obata
Hiroki Takahashi
Application Number:
JP2007100363A
Publication Date:
January 09, 2013
Filing Date:
April 06, 2007
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G01N21/23; G01J3/447; G01J4/04; G01J9/00
Domestic Patent References:
| JP10332533A | ||||
| JP2005257508A | ||||
| JP2000509830A | ||||
| JP2001165809A | ||||
| JP10082697A | ||||
| JP2001511514A | ||||
| JP2003042895A | ||||
| JP2001141602A |
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes