Title:
PHASE PLATE FOR TRANSMISSION ELECTRON MICROSCOPE AND DATA PROCESSING METHOD OF ELECTRON MICROSCOPE IMAGE
Document Type and Number:
Japanese Patent JP2023181031
Kind Code:
A
Abstract:
To provide a new phase plate method that surpasses all conventional phase contrast methods in terms of sensitivity in order to advance the effective use of a phase plate method by solving a problem in which high electron beam irradiation cannot be applied to targets such as biological materials and polymeric materials because a sample is destroyed by electron beam irradiation, resulting in problems of low sensitivity and low resolution, and the drawback of the phase plate method is the electron beam loss when the electron beam passes through the phase plate, which weakens the recovered phase contrast.SOLUTION: The phase of a phase plate 14 provides the maximum sensitivity around (1/2)π. The φ-Hilbert phase plate (φ<π) gives a mixed image of a normal image corresponding to the Zernike phase contrast image and a differential image corresponding to the Hilbert differential type image, but two left and right Hilbert phase plate methods of setting optical axes at 21 and 22 are performed, a highly sensitive phase contrast method (left and right φ-Hilbert phase plate integration method) that surpasses all conventional phase contrast methods is obtained by combining the sum and difference images of the two acquired images. The theoretical results are verified with an electron microscope simulator.SELECTED DRAWING: Figure 6
Inventors:
NAGAYAMA KUNIAKI
Application Number:
JP2022104071A
Publication Date:
December 21, 2023
Filing Date:
June 10, 2022
Export Citation:
Assignee:
N EM LAB CO LTD
International Classes:
H01J37/22; G02B21/14; H01J37/26