Title:
PHASE SHIFTING AMOUNT MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JPH1114461
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a phase shifting amount measuring instrument which can measure the phase shifting amount of a phase shifter formed on a phase shifting mask with high accuracy even when the width of the phase shifter varies. SOLUTION: In an instrument which irradiates a phase shifting mask 4 with different light rays polarized in two directions which are generated by shifting ultraviolet rays in the lateral direction through a first polarizing prism 10 and measures the phase shifting amount of a phase shifter on the mask 4 based on the intensity of interference which is caused when the light rays polarized in two directions passed through the mask 4 are superposed upon another by means of a second polarizing prism 14, a first variable power lens 30 which changes the lateral shifting amount of each ultraviolet ray or each laser light of the light rays polarized in two directions shifted in the lateral direction through the first prism 10 and a second variable power lens 31 which returns the lateral shifting amount of each ultraviolet ray or each laser light of the light rays polarized in two directions passed through the mask 4 to the lateral shifting amount before the lateral shifting amount is changed in power.
Inventors:
OHASHI KATSUKI
Application Number:
JP16728797A
Publication Date:
January 22, 1999
Filing Date:
June 24, 1997
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01J9/00; G01N21/45; G03F1/68; G03F1/84; (IPC1-7): G01J9/00; G01N21/45; G03F1/08
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