Title:
PHOSPHOR
Document Type and Number:
Japanese Patent JP2009080124
Kind Code:
A
Abstract:
To provide a phosphor which emits fluorescence corresponding to incident electrons.
An electron beam detector is integrated with a compound semiconductor substrate and an optical detector by optically connecting the fluorescence emitting surface of the compound semiconductor with a light incident surface of the optical detector using a light guide, and physically connecting the compound semiconductor substrate and the optical detector. The incident electron ray is detected such that the compound semiconductor substrate converts the incident electrons to the fluorescence, the light guide transmits the fluorescence to the optical detector, and the optical detector detects the fluorescence. Therefore, the incident electron rays are detected.
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Inventors:
KONDO MINORU
NAGAI TOSHIMITSU
KIBUNE ATSUSHI
NAGAI TOSHIMITSU
KIBUNE ATSUSHI
Application Number:
JP2008283431A
Publication Date:
April 16, 2009
Filing Date:
November 04, 2008
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
G01T1/20; C09K11/56; C09K11/74; C09K11/88; G01T1/202; H01J1/63; H01J29/38; H01J37/244; H01J40/16; H01J43/04; H01J43/22; H01J49/00; H01J49/06
Domestic Patent References:
| JPS5418269A | 1979-02-10 | |||
| JP2000008035A | 2000-01-11 | |||
| JPH11339681A | 1999-12-10 | |||
| JP2000249768A | 2000-09-14 |
Attorney, Agent or Firm:
Kazuhiro Kitazawa
Shin Koizumi
Akiko Ichikawa
Kunihiko Wakabayashi
Shin Koizumi
Akiko Ichikawa
Kunihiko Wakabayashi
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