To provide a photo-curable transfer sheet to be used for producing an intermediate stamper in a nanoimprint process method, which is improved in releasability from a mold of a fine concavo-convex pattern and releasability from a photo-curable resin for transferring the concavo-convex pattern and is excellent in transfer properties; and to provide a method for forming the concavo-convex pattern using the same.
The photo-curable transfer sheet 10 includes photo-curable transfer layer 11 constituted of a photo-curable composition which is deformed by pressure and contains a polymer and a reactive diluent having a photo-polymerizing functional group.The polymer is constituted of a resin having an alicyclic repeating unit and a (meth)acrylate repeating unit in its main chain. The content of alicyclic repeating unit in the polymer is 15-70 mass%. The method for forming a concavo-convex pattern uses the photo-curable transfer sheet.
HASHIMOTO KENJI
KAIDA EIZO
