Title:
PHOTO ETCHING
Document Type and Number:
Japanese Patent JPS5261482
Kind Code:
A
Abstract:
PURPOSE:To make fine patterns by dissolving resist after exposure throug the use of a first solvent for photo resist and if necessary a second solvent which dissolves the first solvent after cooling to room temperature or under.
Inventors:
NAGATA KAZUSHI
SUEHIRO KAZUTO
SUEHIRO KAZUTO
Application Number:
JP13797175A
Publication Date:
May 20, 1977
Filing Date:
November 17, 1975
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/30; H01L21/027; H01L21/302; (IPC1-7): H01L21/302
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