PURPOSE: To utilize effectively the reactive gas for the optical inductive reaction by making the photoprocessing reaction proceed in the static state wherein both the valve of gas incoming side and the valve of exhausting side are closed after the reactive gas is introduced into the reaction chamber.
CONSTITUTION: The whole system is vacuumized by the vacuum exhaust equipment 8. Then the valve 5 is opened to leak the reactive gas from the reactive gas source 3, which is introduced to the reaction chamber 1. During this period the valve 7 is kept closed, and the valve 5 is closed when the pressure in the reaction chamber has reached a definite value (under the decreased pressure). The light from the light source 9 is introduced into the reaction chamber 1 through the lens 10 and the light-transparent window 11, which makes the photoprocess advance. After a definite period of time, the valve 7 is opened to exhauste the reactive gas and the formed gas remaining in the reaction chamber 1. Such a process makes it possible to utilize effectively the reactive gas introduced in the reaction chamber for the optical inductive reaction.
YAJIMA YUSUKE
MURAYAMA SEIICHI
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