PURPOSE: To simplify the coupling of a semiconductor laser with an optical fiber and to improve the reproducibility of the coupling efficiency or the like by providing a resin shaped in a convex lens for focussing the optical output and controlling the emission direction in the optical output section of the semiconductor laser.
CONSTITUTION: The emitted light from the resonator surface is upwardly reflected at a reflecting surface which is inclined by about 45° with respect to the principal surface of a semiconductor substrate 1 positioned in front, and is focussed by a polyimide resin 10 of the shape of a convex lens formed between the resonator surface and the reflecting surface. And the emission direction of the focussed optical output is made variable by changing the position of the polyimide resin 10, whereby the oblique angle of the reflecting surface becomes constant. The polyimide resin 10 is shaped into a convex lens by selectively forming a photo resist 53 on the surface of a polyimide resin 52 formed on a semiconductor substrate 51, and isotropically etching the polyimide resin 52 and the photo resist 53 in an oxygen plasma atmosphere.
| JPH05114574 | MANUFACTURE OF SEMICONDUCTOR DEVICE |
| JPS53121573 | MANUFACTURE OF SEMICONDUCTOR |
TSUJII HIRAAKI
SASAI YOICHI
SHIDA ATSUSHI
Next Patent: SEMICONDUCTOR LIGHT EMITTING DEVICE AND MANUFACTURE THEREOF