Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PHOTOBASE GENERATOR, RESIST-PATTERN FORMING MATERIAL AND METHOD FOR PREPARING RESIST
Document Type and Number:
Japanese Patent JP2013121996
Kind Code:
A
Abstract:

To provide a photobase generator generating a base by absorbing UV light of shorter wavelengths; and provide a pattern forming material excellent in resolution with good balance of characteristics between exposure part and non-exposure part, usable as negative/positive dual-purpose type resist.

This photobase generator expressed by formula (1) generates a base expressed by formula (2) by selectively absorbing UV light with 190-230 nm wavelengths. In formulae (1) and (2), R1 and R2 each independently is H, methyl, cyclohexyl or cyclohexyl substituted by 1-6C alkyl; when either R1 or R2 is H or methyl, the other is cyclohexyl or cyclohexyl substituted by 1-6C alkyl; R1 and R2 may bond together to form a ring.


Inventors:
MINO KAZUYA
MIKI SADAO
Application Number:
JP2011270209A
Publication Date:
June 20, 2013
Filing Date:
December 09, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
EIWEISS KK
International Classes:
C09K3/00; G03F7/004; G03F7/038; G03F7/039; G03F7/38; H01L21/027; C07C271/24
Attorney, Agent or Firm:
Patent corporation ssinpat