To provide a ceramic photocatalyst filter and a photocatalyst filter unit with the adsorption/decomposition efficiency of ammonia gas improved selectively.
The ceramic photocatalyst filter 20 is produced by forming a substrate layer of a three-dimensional net structure based on SiO2 and containing about 21 wt% of Al2O3, forming a photocatalyst layer based on TiO2 and having a TiO2:SiO2 weight ratio of about 8:2 on the surface of the substrate layer and modifying the surface of the photocatalyst layer to impart weak acidity. The photocatalyst filter unit F using the filter 20 is arranged at the air outlet 2 supplying air into a clean room 1 for processes of manufacturing e.g. a semiconductor, a liquid crystal or an organic EL. In the unit F, the filter 20 housed in a side-surface frame 11 and a light source lamp 31 can be replaced by opening a top panel 12 attached to the side-surface frame 11 in a rotatable way.
KURIYANO NOBUKI
TAWARA ICHIKUN
EBIHARA NAOHITO
PLA NET CORP
Yuriko Shirota
Next Patent: SEPARATION METHOD FOR FOREIGN MATTER PARTICLE