To provide a photocathode plate capable of obtaining highly sensitive characteristics stably, and to provide an electron tube using such a photocathode plate.
In a photomultiplier tube 1, an insulating layer 63 is formed between a semiconductor electron-discharging layer 51 in the photocathode plate 23A and a first electrode 65 electrically connected to an electron emission section 59. The insulating layer 63 can perform heat cleaning to the photocathode plate 23A at a high temperature in a stage before an active layer 61 is formed at an exposed portion in the semiconductor electron-discharging layer 51 at the electron emission section 59, thus effectively cleaning the exposed portion in the semiconductor electron-discharging layer 51 at the electron emission section 59, stabilizing physical properties at the exposed portion, and hence stably obtaining the highly sensitive characteristics in the photocathode plate 23A and the photomultiplier tube 1 using the photocathode plate 23A.
ARAGAKI MINORU
HIROHATA TORU
MORI KUNIYOSHI
| JPH0778554A | 1995-03-20 | |||
| JP2001507498A | 2001-06-05 | |||
| JPS62299088A | 1987-12-26 |
Shiro Terasaki
Satoru Ishida
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