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Title:
PHOTOCONDUCTIVE MATERIAL
Document Type and Number:
Japanese Patent JPS61126557
Kind Code:
A
Abstract:

PURPOSE: To reduce drop of acceptance potential due to exposure immediately before electrostatic charging without peeling of a film by laminating a charge injection preventive layer made of an amorphous silicon carbide on a conductive substrate, and on this layer a photoconductive layer made of an amorphous silicon.

CONSTITUTION: The photoconductive material 1 is composed of the conductive substrate 2, the charge injection preventive layer 3 made of an amorphous silicon carbide contg. an element of group IIIa or Va of the periodic table in an amt. of 1×10-4W1.0 atomic % formed on the substrate 2, the first photoconductive layer 4 made of an amorphous silicon contg. said element in an amt. of 1×10-4 atomic % formed on the layer 3, the second photoconductive layer 5 made of amorphous silicon carbide contg. said element in an amt. of 1×10-8 1×10-4 atomic % formed on the layer 4, and a surface coat layer 6 made of an amorphous silicon carbide, silicon nitride, or silicon oxide formed on the layer 5 for enhancing chemical stability.


Inventors:
YAMAZAKI MUTSUKI
Application Number:
JP24808684A
Publication Date:
June 14, 1986
Filing Date:
November 26, 1984
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G03G5/08; G03G5/082; G03G5/14; H01L31/0248; (IPC1-7): G03G5/08; G03G5/14; H01L31/08
Attorney, Agent or Firm:
Norio Ogo (1 outside)



 
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