Title:
光検出器および光を検出するための方法
Document Type and Number:
Japanese Patent JP7157675
Kind Code:
B2
Abstract:
A method and a light detector that includes (i) a photon to electron converter a photon to one or more photoelectrons; (ii) a photoelectron detection circuit that includes a photoelectron sensing region; (iii) a chamber; (iv) a bias circuit that is configured to supply to the light detector one or more biasing signals for accelerating a propagation of the one or more photoelectrons within the chamber and towards the photoelectron sensing region; (iv) a photoelectron manipulator that is configured to operate in a selected operational mode out of multiple operational modes that differ by their level of blocking, (v) a controller that is configured to control the photoelectron manipulator based on a feedback about the at least one of (a) the photon, (b) the one or more photoelectrons, (c) a previous photon and, (d) previous one or more photoelectrons.
Inventors:
Raphael Matthews
Tarkuzunizu
Pavel Margulis
Tarkuzunizu
Pavel Margulis
Application Number:
JP2019014596A
Publication Date:
October 20, 2022
Filing Date:
January 30, 2019
Export Citation:
Assignee:
Applied Materials Israel Limited
International Classes:
G01J1/42; G01J1/02; H01J1/34; H01J40/16
Domestic Patent References:
| JP10048044A | ||||
| JP5187914A |
Foreign References:
| US20070051879 | ||||
| US20130148112 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Yoshi Kazuhiko Ta
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Yoshiaki Kudo
Yoshi Kazuhiko Ta
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Yoshiaki Kudo