Title:
PHOTODETECTOR, SOLID STATE IMAGING DEVICE, AND METHOD FOR MANUFACTURING PHOTODETECTOR
Document Type and Number:
Japanese Patent JP2021086844
Kind Code:
A
Abstract:
To provide a photodetector with good light collection efficiency for near-infrared light.SOLUTION: The photodetector 10 comprises: a semiconductor substrate 100; a photoelectric conversion unit 101 provided on the semiconductor substrate 100; a laminate 200 positioned above the semiconductor substrate 100 and including a plurality of wiring layers 201 and an interlayer insulating film 202 positioned between the plurality of wiring layers 201; and a waveguide 300 penetrating at least a part of the laminate 200 and introducing light into the photoelectric conversion unit 101. The waveguide 300 is formed by a Group 14 elementary substance or by a compound of Group 14 elements.SELECTED DRAWING: Figure 1
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Inventors:
TORASAWA NAOKI
Application Number:
JP2019212125A
Publication Date:
June 03, 2021
Filing Date:
November 25, 2019
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
H01L27/146; H01L31/0232; H01L31/107
Attorney, Agent or Firm:
Hiromori Arai
Eisaku Teratani
Shinichi Michisaka
Eisaku Teratani
Shinichi Michisaka