Title:
光検出器
Document Type and Number:
Japanese Patent JP5255873
Kind Code:
B2
Abstract:
An infrared detector 1 by having a bolometer element 11 and a reference element 21 is provided with a bolometer thin film 22 supported on a surface of a substrate 10 while spaced apart from the surface of the substrate 10, a metal film 23 for heat dissipation formed on a surface of the bolometer thin film 22 via an insulating film 31, wherein the surface of the bolometer thin film 22 faces the substrate 10, and a plurality of metal columns 25 connected thermally with the metal film 23 for heat dissipation and the substrate 10. Since heat generated from a photodetecting portion 22a by infrared rays is efficiently dissipated to the substrate 10 via the insulating film 31, the metal film 23 for heat dissipation, the metal columns 25 and a metal film 24 for heat dissipation on the side of the substrate, only temperature variation caused by variation in use environment can be measured accurately, and downsizing can be achieved while efficiently reducing the influence of temperature variation in use environment.
Inventors:
Suzuki Jun
Fumiichi Ojima
Ryusuke Kitaura
Fumiichi Ojima
Ryusuke Kitaura
Application Number:
JP2008068074A
Publication Date:
August 07, 2013
Filing Date:
March 17, 2008
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01J1/02; G01J1/42; H01L27/144; H01L37/00
Domestic Patent References:
| JP10209418A | ||||
| JP2001099705A | ||||
| JP4274346A | ||||
| JP2005043381A | ||||
| JP2008022315A | ||||
| JP10185681A | ||||
| JP2002533668A | ||||
| JP2008219613A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Satoru Ishida
Kenichi Shibayama
Shiro Terasaki
Satoru Ishida
Kenichi Shibayama