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Patent Searching and Data


Title:
PHOTOELECTRIC CATHODE
Document Type and Number:
Japanese Patent JPH10241554
Kind Code:
A
Abstract:

To provide a photoelectric cathode whose productivity is improved together with the detection sensitivity of an electron tube using the cathode.

This photoelectric cathode comprises an UV glass substrate 3 and a layered body 10 produce by successively forming a SiO2 layer 15, a GaAlN layer 17a, a group III-V nitride-based semiconductor layer 18, and an AlN buffer layer 17 on the UV glass substrate 3. Since the UV glass substrate 3 absorbs infrared rays, heat treatment can be carried out at high speed by the optical heating and UV rays are transmitted through the substrate 3, so that the UV rays can be introduced into the group III-V nitride-based semiconductor layer 18 which carries out photoelectric transfer.


Inventors:
FUTAHASHI TOKUAKI
Application Number:
JP4639897A
Publication Date:
September 11, 1998
Filing Date:
February 28, 1997
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
H01J1/34; H01J29/38; H01J31/50; H01J40/06; (IPC1-7): H01J1/34
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)