PURPOSE: To provide an optical waveguide device structure for reduction of an influence of the temperature change and its production method with respect to a waveguide modulator made on ferroelectric crystal.
CONSTITUTION: This optical waveguide device structure consists of a substrate 102 having a top surface and a bottom face, a waveguide 108 formed in the top surface, plural electrodes 110 and 112 formed on at least a part of the waveguide 108 on the top surface, and a conductive layer 402 formed on the bottom face of the substrate 102 and is electrically coupled to the ground face of the top surface or is merely coupled to the ground potential. Thus, the conductive layer on the top surface acts to thermally stabilize the operating modulator.
SUCHIIBUN KEE KOROTOKII
JIYON JIEE BESERUKA
JPS62173428A | 1987-07-30 | |||
JPH0383025A | 1991-04-09 | |||
JPH0527276A | 1993-02-05 | |||
JPH03202810A | 1991-09-04 |
EP0554593A1 | 1993-08-11 |