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Title:
PHOTOELECTRIC SURFACE, METHOD OF MAKING SAME, AND PHOTOELECTRIC CONVERSION TUBE USING SAME PHOTOELECTRIC SURFACE
Document Type and Number:
Japanese Patent JPH04303534
Kind Code:
A
Abstract:

PURPOSE: To form a photoelectric surface wherein the S/N ratio of emitted electrons for incident light is improved without lowering the electron emission efficiency in the effective region and cross talks between channels is decreased and to provide a photoelectric conversion tube using the photoelectric surface.

CONSTITUTION: A photoelectric surface includes a photoelectric surface portion 2 formed of a group 3-5 compound semiconductor and an oxide layer 7 formed around the photoelectric region. Optically, the photoelectric surface portion 2 of a group 3-5 compound semiconductor is of a galliumarsenic compound semiconductor and the oxide layer contains aluminum with its surface being oxidezed. In the photoelectric surface of the group 3-5 group compound semiconductor the electron emission efficiency is high. An oxide layer 7 is formed around the photoelectric region. Electron emission from the oxide layer 7 is conciderably decreased and the S/N ratio is improved. Also emission of photoelectrons due to the incident light is suppressed and the cross talk is decreased.


Inventors:
FUTAHASHI TOKUAKI
Application Number:
JP8928391A
Publication Date:
October 27, 1992
Filing Date:
March 29, 1991
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
H01J1/34; H01J9/12; H01J29/38; H01J40/16; H01J43/20; (IPC1-7): H01J1/34; H01J9/12; H01J29/38; H01J40/16
Domestic Patent References:
JPS5713647A1982-01-23
Attorney, Agent or Firm:
Takahisa Sato