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Title:
PHOTOETCHING OF METAL PLATE
Document Type and Number:
Japanese Patent JPS5412735
Kind Code:
A
Abstract:

PURPOSE: To facilitate the detection of an etch pit which occurs on the surface of a metal plate below the photosensitive film at the time of etching and enhance a resolving power by providing a black film which can be etched on th surface to be etched.


Inventors:
NAKAMURA YUUZOU
HASHIGUCHI WAKIO
SHIMURA TAKESHI
Application Number:
JP7711177A
Publication Date:
January 30, 1979
Filing Date:
June 30, 1977
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H05K3/06; C23F1/00; G03F7/11; G03F7/20; H01L21/027; (IPC1-7): C23F1/02; G03C5/00; H01L21/302; H05K3/06
Domestic Patent References:
JPS4887903A1973-11-19
JPS498182A1974-01-24



 
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