Title:
PHOTOLABILE POLYMER WITH TRIAZENE AND/OR PENTAZADIENE STRUCTURAL UNITS
Document Type and Number:
Japanese Patent JPH06322117
Kind Code:
A
Abstract:
PURPOSE: To provide a polymer comprising triazene and/or pentazadiene structural units and being the most suitable as a biochemical reagent used as a photoresist, especially a positive photoresist.
CONSTITUTION: A triazene and/or pentazadiene polymer is used as a photoresist, especially a positive photoresist. This is a polymer obtained by diazotizing a difunctional aromatic amino compound to convert it into the corresponding bisdiazonium salt and polycondensing this with an amino-containing compound. The amino-containing compound used is a difunctional primary or secondary amine of the formula: R1-NH-Z-NH-R2 (wherein Z is a non-aromatic hydrocarbon group; and R1 and R2 are each H or the like).
Inventors:
STEBANI JUERGEN (DE)
NUYKEN OSKAR (DE)
SLUKA PETER (DE)
FINCKH PETER (DE)
NUYKEN OSKAR (DE)
SLUKA PETER (DE)
FINCKH PETER (DE)
Application Number:
JP6738794A
Publication Date:
November 22, 1994
Filing Date:
April 05, 1994
Export Citation:
Assignee:
BOEHRINGER MANNHEIM GMBH (DE)
International Classes:
C08G73/00; C09D179/00; G03F7/039; H01L21/027; H01L21/30; (IPC1-7): C08G73/00; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Yusuke Hiraki (2 outside)