Title:
フォトマスクの検査方法
Document Type and Number:
Japanese Patent JP4467962
Kind Code:
B2
Inventors:
Shinya Tokunaga
Tsujikawa Yoko
Tadashi Tanimoto
Tsujikawa Yoko
Tadashi Tanimoto
Application Number:
JP2003393946A
Publication Date:
May 26, 2010
Filing Date:
November 25, 2003
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G01N21/956; G03F1/84; H01L21/027
Domestic Patent References:
| JP2002244275A | ||||
| JP2000113189A | ||||
| JP2003121983A | ||||
| JP2002532760A |
Attorney, Agent or Firm:
Shohei Oguri
Kimihide Hashimoto
Toshimitsu Ichikawa
Kimihide Hashimoto
Toshimitsu Ichikawa