フォトレジスト組成物 - Rohm and Haas Electronic Materials, L.L.C.

Title:

フォトレジスト組成物

Document Type and Number:

Japanese Patent JP2005508512

Kind Code:

A

Inventors:

Charles Earl, Sumanda
Taylor, Gary N

Application Number:

JP2002575708A

Publication Date:

March 31, 2005

Filing Date:

March 15, 2002

Export Citation:

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Assignee:

Rohm and Haas Electronic Materials, L.L.C.

International Classes:

C08F232/08; G03F7/004; G03F7/033; G03F7/039; G03F7/11; H01L21/027; (IPC1-7): G03F7/039; C08F232/08; G03F7/004; G03F7/033; G03F7/11; H01L21/027

Attorney, Agent or Firm:

Minoru Senda
Hisashi Tsuji
Koji Hashimoto

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