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Patent Searching and Data


Title:
PHOTORESIST COMPOSITION
Document Type and Number:
Japanese Patent JPS62147452
Kind Code:
A
Inventors:
KAORIN ENU CHION
BII JIEIN RIN YAN
JIYAA MIN YAN
Application Number:
JP25714986A
Publication Date:
July 01, 1987
Filing Date:
October 30, 1986
Export Citation:
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Assignee:
INTERNATL BUSINESS MACH CORP
International Classes:
G03C1/72; G03F7/008; G03F7/012; G03F7/022; G03F7/023; G03F7/038; G03F7/039; H01L21/027; (IPC1-7): G03C1/72; G03F7/08
Domestic Patent References:
JPS60159847A
JPS6294840A
JPS52117392A
JPS5158102A
JPS51107820A
JPS5315233A
JPS60182437A



 
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