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Patent Searching and Data


Title:
PHOTORESIST POLYMER AND METHOD FOR MANUFACTURING IT
Document Type and Number:
Japanese Patent JP2003231721
Kind Code:
A
Abstract:

To obtain a photoresist polymer which is capable of dissolving easily and surely into a solvent at the time of preparing a photoresist resin composition.

The photoresist polymer has at least one kind of a repeating unit selected from among (A) a repeating unit containing a lactone skeleton, (B) a repeating unit containing a group to be eliminated by an acid and to become alkali soluble and (C) a repeating unit containing an alicyclic skeleton having a hydroxyl group, and is characterized in that an insoluble matter is 1 wt.% or less when 1 g of the sample is stirred at 25°C for 24 hours into the dissolution in 4 g of propylene glycol monomethyl ether acetate.


Inventors:
WATANABE HITOSHI
HAYAMIZU HIDETAKA
Application Number:
JP2002034897A
Publication Date:
August 19, 2003
Filing Date:
February 13, 2002
Export Citation:
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Assignee:
DAICEL CHEM
International Classes:
G03F7/039; C08F6/00; C08F220/18; C08F220/28; (IPC1-7): C08F220/28; C08F6/00; C08F220/18; G03F7/039
Attorney, Agent or Firm:
Yukihisa Goto