To obtain a remover compsn. capable of easily removing residue of a photoresist at a low temp. in a short time and capable of superfine working without corroding a wiring material by specifying the mixing ratio among the components of a compsn. consisting of a specified alkanolamine, hydroxylamine or its deriv., sugar or sugar-alcohol and water.
This remover compsn. consists of 10-70wt.% alkanolamine, alkoxyamine or alkoxyalkanolamine represented by the formula R1R2- NCmH2mOR3, 1-40wt.% hydroxylamine or its deriv., 1-20wt.% sugar or sugar- alcohol and the balance water and preferably further contains 0.01-1.0wt.% surfactant. In the formula, each of R1 and R2 is H, 1-4C alkyl or hydroxyethyl, R3 is H, 1-4C alkyl, hydroxyethyl, methoxyethyl or ethoxyethyl and (m) is an integer of 2-4.
IWATA KEIICHI
HANEDA MAYUMI
IKEDA HIDETOSHI
