感光性接着剤組成物、これを用いて得られる接着フィルム、接着シート、接着剤パターン、及び半導体装置

Title:

感光性接着剤組成物、これを用いて得られる接着フィルム、接着シート、接着剤パターン、及び半導体装置

Document Type and Number:

Japanese Patent JP5353064

Kind Code:

B2

Abstract:

To provide a photo-sensitive adhesive composition superior in a pattern forming property by an alkaline developer and having sufficient re-adhesion after exposed, and to provide an adhesive film also superior in pattern forming property by an alkaline developer, having a sufficient re-adhesion after exposure and capable of adhering it to an adherend at a low temperature.

The photo-sensitive adhesive composition comprises (A) an alkali-soluble resin, (B) an epoxy resin, (C) a radiation-polymerizable compound and (D) a photo-initiator, in which (A) the alkali-soluble resin has a glass transition temperature of 150°C or lower, (B) the epoxy resin has (B1) a component with three or more functions and (B2) a liquid component of which a part or all may be also (B1) a component with three or more functions.

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Inventors:

Takashi Masuko
Takashi Kawamori
Mitsukura
Katogi Shigeki

Application Number:

JP2008143143A

Publication Date:

November 27, 2013

Filing Date:

May 30, 2008

Export Citation:

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Assignee:

Hitachi Chemical Co., Ltd.

International Classes:

C09J179/08; C09J4/02; C09J7/02; C09J163/00; G03F7/004; G03F7/037; G03F7/075; H01L21/52

Domestic Patent References:

JP2005206737A

Foreign References:

WO2007004569A1

Attorney, Agent or Firm:

Yoshiki Hasegawa
Yoshinori Shimizu
Tomoya Furoshita

Previous Patent: JPS5353063

Next Patent: ADJUSTING VALVE FOR PROMOTING MIXING OF HIGH VISCOUS FLUIDS