Title:
感光性組成物、パターン形成材料、並びに、これを用いた感光性膜、パターン形成方法、パターン膜、低屈折率膜、光学デバイス、及び、固体撮像素子
Document Type and Number:
Japanese Patent JP5449061
Kind Code:
B2
Inventors:
Masaomi Makino
Kenji Wada
Toshiyuki Saie
Kenji Wada
Toshiyuki Saie
Application Number:
JP2010150639A
Publication Date:
March 19, 2014
Filing Date:
June 30, 2010
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/075; C08F14/18; C08F30/08; G02B1/11; G02B1/111; G02B1/14; G03F7/004; G03F7/038
Domestic Patent References:
| JP2008102486A | ||||
| JP2009258277A | ||||
| JP2010078814A | ||||
| JP2001026416A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Hasegawa Hiromichi
Toshiyuki Ozawa
Hasegawa Hiromichi