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Title:
感光性ポリアミド酸エステル組成物
Document Type and Number:
Japanese Patent JP5043932
Kind Code:
B2
Abstract:
A photosensitive polyamic acid ester composition characterized by comprising 100 parts by mass of a polyamic acid ester consisting only of repeating units represented by a specific skeleton, 1-40 parts by mass of a photoinitiator, 30-1,500 parts by mass of a solvent, and 0-150 parts by mass of a polyamic acid ester consisting only of specific repeating units.

Inventors:
Tamura Nobufumi
Motohiro Niwa
Kimiyuki Maruyama
Application Number:
JP2009509300A
Publication Date:
October 10, 2012
Filing Date:
April 03, 2008
Export Citation:
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Assignee:
Asahi Kasei Electronics Co., Ltd.
International Classes:
G03F7/027; C08F290/14; C08G73/10; G03F7/004; G03F7/40; H01L21/027
Domestic Patent References:
JP2004085637A
JP2003316002A
Foreign References:
WO2000043439A1
Attorney, Agent or Firm:
Asamura patent office
Hideto Asamura
Hajime Asamura
Yukihiro Ikeda
Naganuma Akio
Kajiwara Saiko
Shinmura Morio
Kanamori Koji
Yuko Nagase
Youichi Inoue
Mari Yuge



 
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