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Title:
PHOTOSENSITIVE POLYIMIDE COMPOSITION
Document Type and Number:
Japanese Patent JPH0611832
Kind Code:
A
Abstract:

PURPOSE: To improve preservative stability and photosensitivity by using polymers containing a specified polyimide structural unit, and photosensitive aromatic halonium salt as the essential component.

CONSTITUTION: A polyimide resin obtd. by introducing crosslinking vinyl ether groups into side chains of polyimide molecules is used, namely, a polymer containing a polyimide structural unit expressed by formula is used. This polymer and photosensitive aromatic halonium salt are used as the essential components. In formula, R1 is a quadrivalent org. group, R2 is a trivalent aromatic group, R3 is a bivalent org. group. The photosensitive aromatic halonium salt has strong absorption in 200-300nm region in UV spectrum, the compsn. containing this halonium salt can be used for fine working resist for far UV rays. When the compsn. is used for formation of insulating protective film or the like, the compsn. is dissolved in an org. solvent and applied as a photosensitive resin liquid on a base body.


Inventors:
OKUNOYAMA TERU
Application Number:
JP18989092A
Publication Date:
January 21, 1994
Filing Date:
June 24, 1992
Export Citation:
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Assignee:
TOSHIBA CHEM CORP
International Classes:
C08K5/02; C08L79/08; G03F7/029; G03F7/038; H01L21/027; H01L21/30; H01L23/29; H01L23/31; (IPC1-7): G03F7/038; C08K5/02; C08L79/08; G03F7/029; G03F7/038; H01L21/027; H01L23/29; H01L23/31
Domestic Patent References:
JPH01126638A1989-05-18
JPH0462557A1992-02-27
JPS60100143A1985-06-04
JPH01216345A1989-08-30
JPH04120543A1992-04-21
JPH04330445A1992-11-18
Attorney, Agent or Firm:
Eiji Morota



 
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