Title:
感光性樹脂組成物、SAWフィルタ及びその製造方法
Document Type and Number:
Japanese Patent JP5206182
Kind Code:
B2
Inventors:
Kato Sadaaki
Matsuzaka Osamu
Matsuzaka Osamu
Application Number:
JP2008180651A
Publication Date:
June 12, 2013
Filing Date:
July 10, 2008
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/027; G03F7/037; G03F7/40; H01L21/027
Domestic Patent References:
| JP9090629A | ||||
| JP2007264028A | ||||
| JP2006146244A | ||||
| JP2178302A | ||||
| JP9258441A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Yoshinori Shimizu