Title:
感光性樹脂組成物及びそれを用いた感光性ドライフィルムレジスト
Document Type and Number:
Japanese Patent JP4078478
Kind Code:
B2
Inventors:
Yoshifumi Okada
Kaoru Takagawara
Toshio Yamanaka
Kaoru Takagawara
Toshio Yamanaka
Application Number:
JP2001332859A
Publication Date:
April 23, 2008
Filing Date:
October 30, 2001
Export Citation:
Assignee:
Kaneka Corporation
International Classes:
G03F7/037; C08F2/44; C08F283/12; G03F7/004; G03F7/027; G03F7/028; G03F7/075; H05K3/00; H05K3/28
Domestic Patent References:
| JP10265571A | ||||
| JP8253677A | ||||
| JP6011830A | ||||
| JP63027828A | ||||
| JP5247211A | ||||
| JP2000870A | ||||
| JP2001075270A | ||||
| JP2002351073A | ||||
| JP2002006490A |
Attorney, Agent or Firm:
Takayoshi Kusumoto