Title:
感光性樹脂組成物、これを用いた感光性エレメント、レジストパターンの製造法及びプリント配線板の製造法
Document Type and Number:
Japanese Patent JP4517257
Kind Code:
B2
Inventors:
Takeshi Ohashi
Application Number:
JP2000128989A
Publication Date:
August 04, 2010
Filing Date:
April 25, 2000
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/027; G03F7/033; C08F2/44; C08F2/50; C08F291/00; G03F7/029; G03F7/031; H05K3/06; H05K3/18
Domestic Patent References:
| JP9265187A | ||||
| JP7325398A | ||||
| JP11095427A | ||||
| JP10123708A | ||||
| JP10020491A | ||||
| JP9204044A | ||||
| JP9036545A | ||||
| JP8095245A | ||||
| JP7333846A | ||||
| JP7092673A | ||||
| JP6161103A | ||||
| JP63202740A | ||||
| JP2001290269A | ||||
| JP2000321767A |