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Patent Searching and Data


Title:
PHOTOSENSITIVE RESIN COMPOSITION AND SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH11242333
Kind Code:
A
Abstract:

To provide photosensitive polyimides excellent in preservable stability of varnish and stability left standing in a film forming process and having good ability to form a high definition pattern and to provide a semiconductor element using the polyimides.

This photosensitive resin compsn. consists of a polyamide acid represented by formula (where X is a tetravalent org. group and Y is a divalent org. group) and a multifunctional photo-amine generating compd. Amine groups produced from the photo-amine generating compd. by a photoreaction bond to the carboxyl groups of the polyamide acid where the amine groups are reperesented by the formula and the solubility of the polyamide acid in a developer lowers remarkably after the photoreaction.


Inventors:
KAWAKAMI SUSUMU
SASAKI AKIHIRO
Application Number:
JP4559398A
Publication Date:
September 07, 1999
Filing Date:
February 26, 1998
Export Citation:
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Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
G03F7/004; C08K5/20; C08L79/08; G03F7/038; H05K3/46; (IPC1-7): G03F7/038; C08K5/20; C08L79/08; G03F7/004; H05K3/46
Attorney, Agent or Firm:
Akira Asamura (3 outside)