Title:
感光性樹脂組成物
Document Type and Number:
Japanese Patent JP4677887
Kind Code:
B2
Inventors:
Ryuichiro Taniguchi
Tomoyuki Yuba
Masao Tomikawa
Tomoyuki Yuba
Masao Tomikawa
Application Number:
JP2005338299A
Publication Date:
April 27, 2011
Filing Date:
November 24, 2005
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
G03F7/023; C08G69/26; G03F7/004; H01L21/027
Domestic Patent References:
| JP63044652A | ||||
| JP2002169283A | ||||
| JP61190537A | ||||
| JP2002284875A | ||||
| JP2002328472A | ||||
| JP2004295116A | ||||
| JP7168359A | ||||
| JP2004004703A |