Title:
感光性樹脂前駆体組成物
Document Type and Number:
Japanese Patent JP4396161
Kind Code:
B2
Inventors:
Yuji Fujita
Mitsufumi Suwa
Masao Tomikawa
Mitsufumi Suwa
Masao Tomikawa
Application Number:
JP2003205652A
Publication Date:
January 13, 2010
Filing Date:
August 04, 2003
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
G03F7/004; C08G73/06; G03F7/023; G03F7/037; H01L21/027
Domestic Patent References:
| JP11143066A | ||||
| JP3255446A | ||||
| JP2228665A | ||||
| JP2001139806A | ||||
| JP2002023363A | ||||
| JP2000122289A | ||||
| JP2002122991A | ||||
| JP2001166484A | ||||
| JP2001249452A | ||||
| JP8076372A | ||||
| JP64006947A | ||||
| JP2001242629A |
Foreign References:
| WO2001010964A1 |