Title:
感光性組成物、およびそれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5317611
Kind Code:
B2
Inventors:
Arisa Yamada
Shigeki Hattori
Shigeki Hattori
Application Number:
JP2008246448A
Publication Date:
October 16, 2013
Filing Date:
September 25, 2008
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C07C39/12; G03F7/004; H01L21/027
Domestic Patent References:
| JP4330444A | ||||
| JP10048819A | ||||
| JP2007142353A1 |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen