Title:
PHOTOSENSOR SUBSTRATE, MANUFACTURE THEREOF, AND PHOTOSENSOR USING THE SUBSTRATE
Document Type and Number:
Japanese Patent JP3487745
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a photosensor substrate having a rough surface which is optimal for light-confining effect at a low cost by forming a plastic substrate having a surface shape transferred from a master substrate having an Sn oxide film having a surface roughness which is optimal for the light-confining effect.
SOLUTION: A master substrate if composed of a glass or metal substrate 1 and Sn oxide (SnO2) film having a light-confining surface roughness on the substrate 1. An Sn oxide film having surface roughness is manufactured by forming an SnO2 film on the substrate 1 by the ordinary-pressure CVD, thus forming a master substrate 10 with the substrate 1 having the SnO2 film. The master substrate 10 is set at specified position in a lower die 11, an upper die 12 is laid on the power die 11, and a plastic material, i.e., polyamide resin is injected from a runner 14 in a sheet-like cavity 13 between the upper die 12 and master substrate 10.
Inventors:
Mikio Taguchi
Application Number:
JP30166097A
Publication Date:
January 19, 2004
Filing Date:
November 04, 1997
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
H01L31/04; (IPC1-7): H01L31/04
Domestic Patent References:
| JP969642A | ||||
| JP766438A | ||||
| JP4119673A | ||||
| JP62105485A | ||||
| JP6298678A |
Attorney, Agent or Firm:
Hiroshi Torii