Title:
PHOTOSENSOR
Document Type and Number:
Japanese Patent JP2015143707
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a photosensor with a simple structure and an improved signal-to-noise ratio.SOLUTION: Wiring is formed on a holding surface of a holding substrate which holds a beam while in contact with the wiring. A through electrode is embedded in the beam and penetrates from a top face to an undersurface of the beam. A photoelectric conversion part is fixed on the top face of the beam and fixed to a thin part of the beam. The photoelectric conversion part includes a photothermal conversion body and a pyroelectric body which are thermally coupled to each other. An upper electrode is in direct contact with the photothermal conversion body. The upper electrode and a bottom electrode face each other with a thermosensitive body interposed therebetween, and are in contact with and electrically conducted with the wiring via the through electrode. A periodic structure is formed in the photothermal conversion body, in which unit structures are periodically arrayed. A part of the unit structure only includes a substance with negative dielectric constant. The electrical property of the pyroelectric body changes by heat. The change in electrical property is transmitted via the through electrode and the wiring to the outside, and is used to determine whether light received by the periodic structure is present or to measure an amount of light received by the periodic structure.
Inventors:
YOKOYAMA HIKARI
OSAWA KO
ASANO MASAMI
OSAWA KO
ASANO MASAMI
Application Number:
JP2015080714A
Publication Date:
August 06, 2015
Filing Date:
April 10, 2015
Export Citation:
Assignee:
KONICA MINOLTA INC
International Classes:
G01J1/02
Domestic Patent References:
| JP2007121194A | 2007-05-17 | |||
| JP2011095137A | 2011-05-12 | |||
| JP2007171174A | 2007-07-05 | |||
| JP2008053615A | 2008-03-06 |
Other References:
JPN7014002014; ＬＩＤＯＲＩＫＩＳ，Ｅ． 他: '"Ｅｆｆｅｃｔｉｖｅ ｍｅｄｉｕｍ ｐｒｏｐｅｒｔｉｅｓ ａｎｄ ｐｈｏｔｏｎｉｃ ｃｒｙｓｔａｌ ｓｕｐｅｒｓｔｒｕｃｔｕｒｅｓ ｏｆ ｍｅｔａｌｌｉｃ ｎａｎｏｐａｒｔｉｃｌｅ ａｒｒａｙｓ"' Ｊｏｕｒｎａｌ ｏｆ Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ Ｖｏｌｕｍｅ １０１, 20070302, Ａｒｔｉｃｌｅ ０５４３０４， ７ Ｐａｇｅｓ
JPN6014027900; ＧＵＥＮＥＹ，Ｄ．ＯＥ． 他: '"Ｉｎｔｒａ-ｃｏｎｎｅｃｔｅｄ ｔｈｒｅｅ-ｄｉｍｅｎｓｉｏｎａｌｌｙ ｉｓｏｔｒｏｐｉｃ ｂｕｌｋ ｎｅｇａｔｉｖｅ ｉｎｄｅｘ ｐｈｏｔｏｎｉｃ ｍｅｔａｍａｔｅｒｉａｌ"' Ｏｐｔｉｃｓ Ｅｘｐｒｅｓｓ Ｖｏｌｕｍｅ １８， Ｉｓｓｕｅ １２, 20100526, Ｐａｇｅｓ １２３４８-１２３５３
JPN6014027902; ＫＯＮＤＯ，Ｔ． 他: '"Ｍｕｌｔｉｌａｙｅｒｅｄ Ｔｈｒｅｅ-Ｄｉｍｅｎｓｉｏｎａｌ Ｓｔｒｕｃｔｒｅｓ ｏｆ Ａｇ Ｎａｎｏｐａｒｔｉｃｌｅｓ ｉｎ Ａｎｏｄｉｃ Ｐｏｒｏｕｓ Ａｌｕｍｉｎａ"' Ｊａｐａｎｅｓｅ Ｊｏｕｒｎａｌ ｏｆ Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ Ｖｏｌｕｍｅ ４９, 20100222, Ａｒｔｉｃｌｅ ０２５００２， ３ Ｐａｇｅｓ
JPN6014027900; ＧＵＥＮＥＹ，Ｄ．ＯＥ． 他: '"Ｉｎｔｒａ-ｃｏｎｎｅｃｔｅｄ ｔｈｒｅｅ-ｄｉｍｅｎｓｉｏｎａｌｌｙ ｉｓｏｔｒｏｐｉｃ ｂｕｌｋ ｎｅｇａｔｉｖｅ ｉｎｄｅｘ ｐｈｏｔｏｎｉｃ ｍｅｔａｍａｔｅｒｉａｌ"' Ｏｐｔｉｃｓ Ｅｘｐｒｅｓｓ Ｖｏｌｕｍｅ １８， Ｉｓｓｕｅ １２, 20100526, Ｐａｇｅｓ １２３４８-１２３５３
JPN6014027902; ＫＯＮＤＯ，Ｔ． 他: '"Ｍｕｌｔｉｌａｙｅｒｅｄ Ｔｈｒｅｅ-Ｄｉｍｅｎｓｉｏｎａｌ Ｓｔｒｕｃｔｒｅｓ ｏｆ Ａｇ Ｎａｎｏｐａｒｔｉｃｌｅｓ ｉｎ Ａｎｏｄｉｃ Ｐｏｒｏｕｓ Ａｌｕｍｉｎａ"' Ｊａｐａｎｅｓｅ Ｊｏｕｒｎａｌ ｏｆ Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ Ｖｏｌｕｍｅ ４９, 20100222, Ａｒｔｉｃｌｅ ０２５００２， ３ Ｐａｇｅｓ
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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