Title:
物理量検出デバイス、電子機器、移動体
Document Type and Number:
Japanese Patent JP6484968
Kind Code:
B2
Abstract:
A physical quantity detection device includes a semiconductor element and a physical quantity detection vibrator element a portion of which overlaps the semiconductor element in a plan view of the semiconductor element. The physical quantity detection vibrator element includes a drive portion including a drive electrode, and a detection portion. At least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element.
Inventors:
Shinya Aoki
Application Number:
JP2014187354A
Publication Date:
March 20, 2019
Filing Date:
September 16, 2014
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01C19/5628; H01L25/00; H01L41/047; H01L41/113; H01L41/311
Domestic Patent References:
| JP2011226928A | ||||
| JP2010002430A | ||||
| JP2008003011A | ||||
| JP10206165A | ||||
| JP2013253895A | ||||
| JP2013201638A |
Foreign References:
| US8794065 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka