Title:
PHYSICAL QUANTITY DETECTION ELEMENT, PHYSICAL QUANTITY SENSOR, AND PHYSICAL QUANTITY SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2023030331
Kind Code:
A
Abstract:
To provide a physical quantity detection element, a physical quantity sensor, and a physical quantity sensor device with excellent temperature characteristics.SOLUTION: A physical quantity detection element 1 includes: a first base end part 63 and a second base end part 64; and a pair of vibration beams 65 having an excitation electrode 90, and extending between the first base end part 63 and the second base end part 64. The vibration beam 65 has a first region R1, a second region R2, and a third region R3. The first region R1 is located between the second region R2 and the first base end part 63. The third region R3 is located between the second region R2 and the second base end part 64. The excitation electrode 90 in the first region R1 is arranged away from the first base end part 63 by the distance of 2.5% or more to 12.3% or less of a whole length LL of the vibration beam 65. The excitation electrode 90 in the third region R3 is arranged away from the second base end part 64 by the distance of 2.5% or more to 12.3% or less of the whole length LL of the vibration beam 65.SELECTED DRAWING: Figure 1
Inventors:
SATO KENTA
OTO MASAYUKI
OTO MASAYUKI
Application Number:
JP2021135396A
Publication Date:
March 08, 2023
Filing Date:
August 23, 2021
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01P15/10; G01P15/18
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura