Title:
PHYSICAL QUANTITY SENSOR AND INERTIAL MEASUREMENT UNIT
Document Type and Number:
Japanese Patent JP2023080597
Kind Code:
A
Abstract:
To provide a physical quantity sensor and the like which can avoid a failure caused by an excessive impact.SOLUTION: A physical quantity sensor 1 detects a physical quantity in at least one of a first direction DR1 and a second direction DR2. The physical quantity sensor comprises a fixed electrode portion 20 provided on a substrate 2, a movable body 60 having a movable electrode portion 20 provided such that a movable electrode 26 faces a fixed electrode 16 of the fixed electrode portion 10, a fixed portion 40 fixed to the substrate 2, a support beam 42 having one end coupled to the fixed portion 40 and the other end coupled to the movable body 60, and a restricting portion 50 that restricts displacement of the movable body 60. The restricting portion 50 includes a first portion 51 having one end coupled to the movable body 60 and extending in the first direction DR1, and a second portion 52 having one end coupled to the other end of the first portion 51 and extending in the second direction DR2.SELECTED DRAWING: Figure 11
Inventors:
NAGATA KAZUYUKI
Application Number:
JP2021194024A
Publication Date:
June 09, 2023
Filing Date:
November 30, 2021
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01P15/08; G01P15/125; H01L29/84
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura