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Patent Searching and Data


Title:
PHYSICAL QUANTITY SENSOR, MANUFACTURE THEREOF, AND MULTI-LAYER CIRCUIT BOARD
Document Type and Number:
Japanese Patent JPH07243928
Kind Code:
A
Abstract:

PURPOSE: To provide a pressure sensor and an acceleration sensor capable of being miniaturized at a low cost by utilizing the wiring pattern of a printed wiring board.

CONSTITUTION: A metal thin film made of copper is formed on the surface of a board 1 made of a base material for the printed board such as an epoxy resin board, and the metal thin film is patterned into a prescribed shape. The board 1 is dissolved from the back face of it to bore a through hole 4, and a diaphragm 3 integrated with a wiring pattern 2 is formed. A metal cover 5 is provided at a fine gap on the upper face of the diaphragm 3, chip parts 7 are mounted on the wiring pattern 2 to form a signal processing circuit 6, and a pressure sensor A is manufactured.


Inventors:
YABE MAMORU
Application Number:
JP6033294A
Publication Date:
September 19, 1995
Filing Date:
March 04, 1994
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
G01L9/04; G01L9/00; H01L29/84; (IPC1-7): G01L9/04; H01L29/84
Attorney, Agent or Firm:
Nakano Masafusa