Title:
Physical quantity sensor
Document Type and Number:
Japanese Patent JP5999027
Kind Code:
B2
Inventors:
Keisugi Sugimoto
Sakai Mineichi
Sakai Mineichi
Application Number:
JP2013114306A
Publication Date:
September 28, 2016
Filing Date:
May 30, 2013
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
| JP201350320A | ||||
| JP2010262961A | ||||
| JP2010171368A |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office