Title:
物理量センサ
Document Type and Number:
Japanese Patent JP6988367
Kind Code:
B2
Abstract:
To provide a physical quantity sensor capable of suppressing enlargement while improving detectability.SOLUTION: Disclosed is a physical quantity sensor which includes: a substrate 1 having one surface 1a and a side surface 1b intersecting with one surface 1a; and a detection part 8 which is arranged on one surface 1a, which has a piezoelectric film 8b and which outputs signals according to the stress generated on the substrate 1 when the substrate 1 vibrates along one direction in the surface direction of one surface 1a. A hole 11 is formed in one surface 1a of the substrate 1, and the detection part 8 is made to be arranged in a position including at least a part of the periphery of an opening of the hole 11.SELECTED DRAWING: Figure 2
Inventors:
Katsuaki Goto
Yusuke Kawai
Yusuke Kawai
Application Number:
JP2017204514A
Publication Date:
January 05, 2022
Filing Date:
October 23, 2017
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01C19/5621; H01L41/113
Domestic Patent References:
| JP8146033A | ||||
| JP6043179A | ||||
| JP4295715A | ||||
| JP2014202616A | ||||
| JP11142157A | ||||
| JP2005181232A | ||||
| JP2007303928A | ||||
| JP2010043926A |
Foreign References:
| CN102967351A |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office