Title:
物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
Document Type and Number:
Japanese Patent JP7215607
Kind Code:
B2
Abstract:
To provide a physical quantity sensor, an inertia measuring device, a mobile body positioning device, a portable electronic apparatus, an electronic apparatus, and a mobile body that have an increased intensity of joint between a substrate and an element part and attain an excellent mechanical strength.SOLUTION: The physical quantity sensor includes: a substrate; a first detection oscillation body and a second detection oscillation body which can oscillate in an X-axial direction; a frame located between the first detection oscillation body and the second detection oscillation body; a first connection spring and a second connection spring connecting the frame to the first and second detection oscillation bodies; a first fixed part and a second fixed part located between the first detection oscillation body and the second detection oscillation body and fixed to the substrate; and a first frame spring and a second frame spring connecting the first fixed part and the second fixed part to the frame. The frame has a first recess part opening to one side in a Y-axial direction and a second recess part opening to another side in the Y-axial direction. The first fixed part is arranged across the inside and the outside of the first recess part and the second fixed part is arranged across the inside and the outside of the second recess.SELECTED DRAWING: Figure 3
Inventors:
Kazuyuki Nagata
Kikuchi Takayuki
Kikuchi Takayuki
Application Number:
JP2022005591A
Publication Date:
January 31, 2023
Filing Date:
January 18, 2022
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01C19/5747
Domestic Patent References:
| JP2007532917A | ||||
| JP2017506337A | ||||
| JP2016057074A | ||||
| JP2006023190A | ||||
| JP2000009474A | ||||
| JP2016099269A | ||||
| JP11257965A |
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura