導電部材の物理的表面改質方法および表面改質装置

Title:

導電部材の物理的表面改質方法および表面改質装置

Document Type and Number:

Japanese Patent JP3572240

Kind Code:

B2

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Inventors:

Kazuyoshi Teramon
Kagiyama Shin
Shizuka Yamaguchi

Application Number:

JP2000068654A

Publication Date:

September 29, 2004

Filing Date:

March 08, 2000

Export Citation:

Assignee:

株式会社日立製作所

International Classes:

C23C14/34; C23C14/38; (IPC1-7): C23C14/34; C23C14/38

Domestic Patent References:

JP5051726A

Attorney, Agent or Firm:

Yukihiko Takada
Masaru Takenouchi

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