Title:
PICKUP FEEDER OF PELLET
Document Type and Number:
Japanese Patent JP3153318
Kind Code:
B2
Abstract:
PURPOSE: To enable a pellet to be stably picked up and bonded.
CONSTITUTION: A pellet pickup feeder is equipped with a suction nozzle 12 which picks up a semiconductor pellet 2, a holder arm 13 which moves in a pickup direction supporting the suction nozzle 12, and an XY moving device 14 supports holder arm 13, where the suction nozzle 12 is supported by the holder arm 13 in such a manner that it is freely movable in a pickup direction and given motion in a pellet pressing direction by an actuator 17 adjustable in thrust, and the thrust of the actuator 17 is controlled by a current controller 18.
Inventors:
Kawabe, Katsuyoshi
Application Number:
JP6931392A
Publication Date:
April 09, 2001
Filing Date:
February 20, 1992
Export Citation:
Assignee:
TOSHIBA SEIKI KK
International Classes:
H01L21/52; H01L21/677; H01L21/68; (IPC1-7): H01L21/52
Attorney, Agent or Firm:
塩川 修治