Title:
ピックアップユニットおよび搬送装置
Document Type and Number:
Japanese Patent JP4138590
Kind Code:
B2
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Inventors:
Hosho Yoshimin
Application Number:
JP2003183171A
Publication Date:
August 27, 2008
Filing Date:
June 26, 2003
Export Citation:
Assignee:
Teseq Co., Ltd.
International Classes:
B25J9/00; H01L21/67; B65G49/07; B65H5/14; H01L21/677; H01L21/68
Domestic Patent References:
| JP9181489A |
Attorney, Agent or Firm:
Masaki Yamakawa