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Patent Searching and Data


Title:
PIEZO-ELECTRIC ACTUATOR
Document Type and Number:
Japanese Patent JP2000034196
Kind Code:
A
Abstract:

To provide a piezo-electric actuator having improved starting-up closing-down characteristics as an actuator through restraining a resonance phenomenon and esp. capable of restraining the mode of secondary vibration resonating in the direction of bending displacement with the secondary resonance frequency different from the primary resonance one.

This piezo-electric actuator comprises (A) a principal driving electrode 4 and (B) a sensor electrode 5 where an output signal is fed back to drown out the mode of primary vibration having a primary resonance frequency. The principal driving electrode 4 extents to a fixed member 11 for fixing the electrode 4 so as to drown out electromechanical coupling to the mode of secondary vibration resonating in the direction of bending displacement with the secondary resonance frequency different from the primary one.


Inventors:
Yanai, Masaki
Wakatsuki, Noboru
Yamada, Sumio
Application Number:
JP1998000200691
Publication Date:
February 02, 2000
Filing Date:
July 15, 1998
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
C30B29/30; G05D3/00; H01L41/04; H01L41/09; H01L41/18; H01H57/00; (IPC1-7): C30B29/30; H01L41/09; H01L41/18
Attorney, Agent or Firm:
小野 由己男 (外2名)